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The CF Blank Flange Rotatable is a specialized vacuum sealing component designed for ultra-high vacuum systems, offering superior sealing performance and rotational functionality. Ideal for semiconductor manufacturing, research equipment, and aerospace applications.
CF Rotatable Blank Flange | Ultra-High Vacuum Sealing Solution | Professional Supplier
Professional CF rotatable blank flanges made of 304L/316L stainless steel, featuring ultra-high vacuum compatibility and exceptional sealing performance. Widely used in semiconductor, research, and aerospace industries. Multiple sizes available with customization options.
The CF Blank Flange Rotatable is a specialized vacuum component belonging to the ConFlat (CF) flange family. Its unique rotatable design provides exceptional flexibility in vacuum system maintenance and configuration. This flange is primarily used to seal ports on vacuum chambers, pipelines, or other system components where frequent access or adjustment is required.
As a critical sealing element in vacuum systems, the CF Rotatable Blank Flange plays an indispensable role in maintaining vacuum integrity, isolating different vacuum zones, and providing maintenance access points. Its applications span from fundamental scientific research to advanced manufacturing, including but not limited to particle physics research, semiconductor wafer processing, and spacecraft vacuum testing under extreme conditions.
CF Flange Body
Material: High-purity stainless steel (304L or 316L) ensuring UHV compatibility and corrosion resistance
Features: Precision-machined knife-edge structure with surface flatness ≤0.8μm Ra
Blank Plate Assembly
Material: Matching stainless steel grade for consistent thermal expansion
Features: Mirror-finished surface (≤0.4μm Ra) with circular/square configuration options
Sealing System
Material: High-purity oxygen-free copper (OFC) gasket
Features: Precision-matched to CF knife-edge dimensions, achieving 10⁻⁹~10⁻¹¹ mbar·L/s leak rates
Rotation Mechanism
Material: Stainless steel bearing components with specialized lubrication
Features: 360° smooth rotation with 0.5-3N·m torque while maintaining seal integrity
Ultra-High Vacuum Compatibility
Bakeable to 250°C (continuous)/300°C (short-term)
Outgassing rate <10⁻¹¹ mbar·L/s·cm²
Suitable for 10⁻⁹~10⁻¹¹ mbar extreme vacuum
Revolutionary Sealing Performance
Metal seal design eliminates organic contamination
Dual knife-edge structure ensures redundancy
Helium leak rate <1×10⁻¹⁰ mbar·L/s
Intelligent Rotation Design
Patented bearing mechanism with <1N·m resistance
±5° micro-adjustment capability
Rotation doesn't affect sealing interface pressure
Exceptional Mechanical Properties
Tensile strength ≥515MPa
Yield strength ≥205MPa
ISO 9001 & ASME B16.5 certified
Engineer-Friendly Design
Tool-free gasket replacement
8 evenly spaced mounting holes
Passivated surface meets SEMI F72 standards
High-Energy Physics
Particle accelerator beamlines
Synchrotron radiation front-ends
Tokamak fusion devices
Analytical Instruments
TEM sample chambers
XPS analysis systems
SIMS vacuum systems
Semiconductor Manufacturing
Chip Production
MBE growth chambers
Ion implanter end stations
EUV lithography modules
Packaging & Testing
Wafer-level vacuum packaging
Reliability test chambers
Hermeticity testing systems
Spacecraft outgassing evaluation
Space telescope optical systems
Propulsion Systems
Ion thruster test stands
Hall-effect thruster validation
Cryogenic fuel systems
| Model | Part No. | Dimensions (mm) | Weight (kg) | Max Pressure | Rotation Torque |
| OD (A) | BCD (B) | Thick (D) | |||
| CF16 | 55051-164 | 33.7 | 18 | 7.6 | 0.35 |
| CF25 | 55051-254 | 53.8 | 29 | 11.9 | 0.45 |
| CF35 | 55051-354 | 69.3 | 39 | 12.7 | 0.65 |
| CF50 | 55051-504 | 85.3 | 56 | 17.3 | 0.85 |
| CF63 | 55051-634 | 113.5 | 71 | 19.1 | 1.2 |
| CF100 | 55051-1004 | 151.6 | 109 | 21.3 | 1.8 |
| CF160 | 55051-1604 | 202.44 | 160 | 23.9 | 2.5 |
| CF200 | 55051-2004 | 253.24 | 208 | 24.6 | 3.2 |
1: Performance advantages in semiconductor equipment compared to standard CF blanks?
CF rotatable flanges offer:Rotation capability for confined spaces; UHV sealing meets chip fabrication specs;316L SS resists vacuum deposition environments;Reduces tool downtime.
2: Vacuum performance in research instruments?
Our CF flanges deliver:Standard 10⁻⁹~10⁻¹¹ mbar for electron microscopes;XHV versions for 10⁻¹² mbar;Ultra-low outgassing for particle accelerators.
3: Rotation reliability in spacecraft testing?
Space-qualified models feature:Dual-seals maintaining <1×10⁻¹⁰ mbar·L/s during rotation;Space-grade bearings; -270°C~+450°C thermal cycling certification.
4: Best practices for UHV component installation?
For vacuum system sealing: Use virgin OFC gaskets; Apply specified torque values; Perform helium leak checks;Maintain pristine sealing surfaces.
5: Gasket replacement cycles in semiconductor tools?
For semiconductor equipment parts:Standard OFC gaskets allow 5-7 compressions; Reduce to 3-5 in etch processes;Inspect after each vacuum deposition service.
6: Custom solutions for particle accelerator projects?
We provide: Large CF flanges (to CF500); Low-secondary-emission surfaces; Low-permeability versions; Integrated sensor ports.
7: Maintenance protocols for spacecraft test equipment?
For spacecraft testing equipment:Semi-annual bolt torque checks;Space-approved lubricants for rotation mechanism;Post-test seal inspections; Dry nitrogen storage.
8: Cleanliness compliance for vacuum deposition systems?
Our vacuum system components: Meet SEMI F72 standards; Include particle test reports; Cleanroom packaging;Offer white-room assembly.
9: High-temperature performance for research instruments?
Research instrument components withstand: 250°C continuous baking;450°C short-term;Special heat treatments ensure UHV compatibility;Include thermal deformation data.
10: Service life evaluation for vacuum seals?
Assess:Seal face wear;Rotation smoothness;Bolt hole deformation;Material corrosion;Recommend biennial inspections for spacecraft test equipment critical seals.
The CF Blank Flange Rotatable represents the optimal solution for ultra-high vacuum systems across semiconductor fabrication, scientific research, and aerospace applications. Its innovative rotatable design, exceptional vacuum performance, and robust construction make it the preferred choice for demanding vacuum environments.
Address : No 19, Zhanqianli, Dong'an, Jimei District, Xiamen, Fujian Province, China
Email : mike@xiamenbest.com vacuum@xiamenbest.com WhatsApp ： +8613959235484 Phone： +8613959235484 +8615880223078
