TXFJ-300 Ultra-High Vacuum Pumping Unit for Semiconductor and Scientific Applications

Why Choose the TXFJ-300 Ultra-High Vacuum Pumping Unit?

The TXFJ-300 from Taixing Industrial is a high-performance vacuum pumping unit engineered for ultra-high vacuum requirements in laboratory and industrial settings. Featuring a 300 L/s air-cooled composite molecular pump, a 10 m³/h mechanical pump, and a high-precision composite vacuum gauge, it achieves an ultimate vacuum of ≤3×10⁻⁵ Pa. Its compact mobile design, air-cooling system, and user-friendly interface ensure operational efficiency, portability, and low maintenance costs, making it an ideal solution for semiconductor manufacturing, mass spectrometry, vacuum coating, medical equipment, and scientific research.

Key Features of the TXFJ-300 Ultra-High Vacuum Pumping Unit

High-Performance Molecular Pump: Delivers a 300 L/s pumping speed with an ultimate vacuum of ≤3×10⁻⁵ Pa, meeting stringent high-vacuum requirements.
Efficient Mechanical Pump: Provides a 10 m³/h pumping speed with a low failure rate, ensuring reliable forepumping.
Air-Cooled Design: Eliminates the need for water cooling, reducing installation complexity and maintenance costs.
High-Precision Vacuum Monitoring: Equipped with a composite vacuum gauge (KF40 ionization gauge + KF16 thermocouple gauge) for accurate monitoring across a 1×10⁵ to 1×10⁻⁵ Pa range.
Compact Mobile Design: Features a mobile cart with a ≥100 kg load capacity, ideal for flexible laboratory setups.
Customizable Flanges and Valves: Supports DN 100 ISO-K inlet and customizable DN 16/25 ISO-KF outlet flanges, with optional NW 100 ISO-F gate valves.
Rapid Startup: Achieves operational readiness in 3–5 minutes, enhancing workflow efficiency.
Low Vibration: Pump vibration amplitude ≤50 μm, ensuring stability in sensitive applications.
Durable Construction: Stainless steel bellows and robust components extend system lifespan.
User-Friendly Operation: Built-in controller and intuitive interface simplify operation and reduce training time.

Applications of the TXFJ-300 Ultra-High Vacuum Pumping Unit

Semiconductor Manufacturing: Supports ultra-high vacuum environments for wafer processing and cleanroom operations.
Mass Spectrometry: Ensures stable vacuum conditions for high-precision analytical instruments.
Vacuum Coating: Facilitates rapid pumping for thin-film deposition and optical coating processes.
Medical Equipment: Provides reliable vacuum for CT scanners and other precision medical devices.
Scientific Research: Enables ultra-high vacuum conditions for particle accelerators and experimental setups.

Case Studies: Real-World Success with the TXFJ-300

The TXFJ-300 has proven its reliability and efficiency across diverse industries. Below are real-world examples showcasing its impact.

Semiconductor Manufacturing: Boosting Wafer Processing Efficiency (China, 2023)

A Chinese semiconductor company required an ultimate vacuum of ≤5×10⁻⁵ Pa for wafer processing in a constrained cleanroom. The TXFJ-300’s 300 L/s molecular pump achieved 3×10⁻⁵ Pa, while its compact mobile cart saved space. The air-cooled design eliminated water-cooling infrastructure, reducing costs by 15%. Results included a 20% increase in pumping efficiency and a 10% improvement in production yield.

Mass Spectrometry: Enhancing Analytical Precision (Europe, 2022)

A European research institute needed a vacuum system for a mass spectrometer with an ultimate vacuum of ≤1×10⁻⁵ Pa and a leakage rate of ≤1×10⁻³ Pa/h. The TXFJ-300’s composite vacuum gauge and KF40 angle valve ensured precise monitoring and sealing. The system maintained 72-hour stable operation, improving analysis accuracy by 12%.

Vacuum Coating: Streamlining Optical Coating Processes (Southeast Asia, 2024)

A Southeast Asian optical company required rapid pumping to 1×10⁻² Pa for coating processes. The TXFJ-300’s air-cooled molecular pump achieved this in <5 minutes, and the 10 m³/h mechanical pump extended maintenance cycles by 30%. This led to a 25% increase in production efficiency and a 10% reduction in spare parts costs.

Medical Equipment: Improving CT Scanner Reliability (USA, 2023)

A U.S. medical device company needed a portable, high-vacuum system for CT scanning equipment. The TXFJ-300’s 80 kg mobile cart and 300 L/s pumping speed met these needs, while air-cooling simplified installation. Deployment time was reduced by 15%, and operational stability improved by 20%.

Scientific Research: Supporting Particle Accelerator Experiments (Japan, 2024)

A Japanese university laboratory required an ultimate vacuum of ≤3×10⁻⁵ Pa for physical experiments. The TXFJ-300’s composite vacuum gauge and user-friendly interface enabled rapid pumping and ease of operation. Experimental efficiency increased by 18%, and operator training time was reduced by 30%.

Technical Specifications

Specification	Value
Product Type	Ultra-High Vacuum Pumping Unit
Ultimate Vacuum	≤3×10⁻⁵ Pa
Molecular Pump Speed	300 L/s
Mechanical Pump Speed	10 m³/h
Test Chamber Size	Ø108 mm × 80 mm
Measurement Range	1×10⁵ to 1×10⁻⁵ Pa
Startup Time	3–5 minutes
Maximum Outlet Pressure	>5 mbar (Nitrogen)
Inlet Flange	Customizable DN 100 ISO-K
Outlet Flange	Customizable DN 16/25 ISO-KF
Power Supply	220/230V or 380/400V, 50/60 Hz
Power Consumption	900 VA
System Weight	≈80 kg
Dimensions (L×W×H)	600×450×900 mm
Cooling Method	Air-Cooled
Operating Temperature Range	10–40°C
Maximum Humidity	80%
Vibration Amplitude	≤50 μm
Leakage Rate	≤1×10⁻³ Pa/h

FAQ: TXFJ-300 Ultra-High Vacuum Pumping Unit

What is the purpose of the TXFJ-300?
It provides ultra-high vacuum conditions for laboratory and industrial applications like semiconductor manufacturing and mass spectrometry.
What is the ultimate vacuum level?
≤3×10⁻⁵ Pa, meeting high-vacuum requirements.
Does it require water cooling?
No, it uses an air-cooled design for simpler installation and lower costs.
What is the startup time?
3–5 minutes, ensuring rapid operational readiness.
What pumps are included?
A 300 L/s air-cooled molecular pump and a 10 m³/h mechanical pump.
Is it suitable for mobile applications?
Yes, its compact cart with ≥100 kg load capacity ensures easy mobility.
What is the measurement range of the vacuum gauge?
1×10⁵ to 1×10⁻⁵ Pa, with a composite KF40 ionization and KF16 thermocouple gauge.
Which industries use the TXFJ-300?
Semiconductor, mass spectrometry, vacuum coating, medical equipment, and scientific research.
Is maintenance complex?
No, the air-cooled design and simple structure reduce maintenance frequency and costs.
Can flanges and valves be customized?
Yes, inlet and outlet flanges, as well as gate and angle valves, are customizable to meet specific requirements.

Conclusion: High-Performance Vacuum Pumping for Precision Applications

The TXFJ-300 Ultra-High Vacuum Pumping Unit delivers exceptional performance, portability, and cost-efficiency for laboratory and small-scale industrial applications. With its 300 L/s air-cooled molecular pump, high-precision vacuum monitoring, and compact mobile design, it meets the stringent requirements of semiconductor manufacturing, mass spectrometry, vacuum coating, medical equipment, and scientific research. The TXFJ-300 ensures reliable operation, reduced maintenance, and enhanced productivity, making it the ideal choice for high-vacuum environments.