We are a professional manufacturer specializing in liquid ring, rotary vane, and dry screw vacuum pumps.
Featuring Varian technology, the -5KV Triode Sputter Ion Pump 3L-25 improves noble gas pumping by 300%, making it ideal for research and industrial UHV systems.
The -5KV Triode Sputter Ion Pump 3L-25 achieves breakthrough 6L/S argon pumping speed with stainless steel anode design, delivering 7E-8Pa ultimate vacuum for demanding noble gas applications.
The innovative -5KV Triode Sputter Ion Pump 3L-25 delivers:
6L/S Argon Pumping - 300% improvement over standard designs
Stainless Steel Anode - 2x better corrosion resistance
Enhanced Titanium Grid Cathode - 3x gas capture efficiency
Ultra-Compact Design - Only 222×121×161mm
-5KV Operation - 35% energy savings
| Parameter | Specification | Industry Advantage |
| Model | 3L-25 | Noble gas optimized |
| Flange | DN35CF | Space-saving |
| Voltage | -5KV | Efficient Penning discharge |
| Argon Speed | 6L/S | Industry-leading |
| Ultimate Vacuum | 7×10⁻⁸Pa | UHV performance |
300% better argon handling
5,000+ continuous operation hours
45% improved system stability
18% yield improvement at 28nm
$220,000 annual maintenance savings
Precise process gas control
Patented titanium grid reflection technology triples ion burial efficiency.
2x corrosion resistance with 50,000+ hour lifespan.
Optimized for space-constrained UHV systems.
Triple insulation with CE/UL certifications.
NIST-traceable gauges provide certified measurements.
Significantly better noble gas pumping performance.
Special coating ensures long-term stability.
3 years maintenance-free operation.
Available in -3KV to -8KV versions.
5-year warranty on core components.
Address : No 19, Zhanqianli, Dong'an, Jimei District, Xiamen, Fujian Province, China
Email : mike@xiamenbest.com vacuum@xiamenbest.com WhatsApp ： +8613959235484 Phone： +8613959235484 +8615880223078
