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Home home Products product Ion vacuum pumps product Industrial-Grade 7KV Ion Vacuum Pump 2L-200C: 220L/S Air Pumping Speed for Closed Systems

Industrial-Grade 7KV Ion Vacuum Pump 2L-200C: 220L/S Air Pumping Speed for Closed Systems

Featuring DN150CF flange, the oil-free 7KV ion pump 2L-200C offers 220L/S air pumping speed and closed-system operation, perfect for semiconductor and industrial applications.

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Industrial-Grade 7KV Ion Vacuum Pump 2L-200C: 220L/S Air Pumping Speed for Closed Systems

The 7KV ion vacuum pump 2L-200C delivers 220L/S air and 2.4L/S argon pumping speeds with 1E-8 Pa ultimate vacuum, ideal for industrial closed ultra-high vacuum systems.

Product Highlights

The Industrial-Grade 7KV Ion Vacuum Pump 2L-200C utilizes advanced sputter ion technology to deliver exceptional vacuum performance for closed industrial systems:

Superior pumping performance: 220L/S air speed with 2.4L/S argon capability

Ultra-high vacuum: Achieves 1×10⁻⁸Pa ultimate pressure

Closed system operation: No continuous backing pump required

Industrial durability: Designed for harsh operating environments

Contamination-free: Completely oil-free operation

Technical Specifications

Parameter Specification
Model 2L-200C
Flange DN150CF
Operating Voltage 7KV
Ultimate Pressure 1×10⁻⁸Pa
Bakeout Temperature ≤200°C (magnetic)/≤300°C (non-magnetic)
Dimensions 500×265×430mm
Weight 100kg

Industrial Applications

Semiconductor manufacturing: Provides clean vacuum for wafer processing

Industrial coating systems: Ensures high-quality thin film deposition

Material analysis instruments: Electron microscopes, mass spectrometers

New energy research: Nuclear fusion experimental devices

High-energy physics: Particle accelerator vacuum systems

7KV Ion Vacuum Pump 2L-200C Technical Q&A

1. What makes industrial-grade 7KV ion pumps different?

Features reinforced electrode design and industrial-grade materials for continuous heavy-duty operation.

2. How does 220L/S air speed perform in real applications?

Can evacuate 200L chamber to operating vacuum in just 25 minutes.

3. Why are ion pumps ideal for closed systems?

Self-sustaining operation eliminates need for continuous backing pumps.

4. Is 2.4L/S argon capacity sufficient?

Optimized for semiconductor processes with effective gas handling.

5. What's the sealing performance of DN150CF flange?

Metal seal design ensures UHV integrity with leak rate <5×10⁻¹¹Pa·m³/s.

6. How is 1E-8 Pa vacuum maintained?

Multiple vacuum measurement systems provide real-time monitoring.

7. What's the service life in industrial environments?

Special alloy electrodes provide 60,000+ hours operational life.

8. Is 7KV operation safe?

Multiple electrical protections with CE/UL safety certifications.

9. Are consumables required?

Only periodic electrode inspection needed - no regular consumables.

10. How to select matching systems?

Professional sizing software available for optimal configuration.

Related Rroduct

Address : No 19, Zhanqianli, Dong'an, Jimei District, Xiamen, Fujian Province, China

Email :   mike@xiamenbest.com vacuum@xiamenbest.com WhatsApp : +8613959235484 Phone: +8613959235484 +8615880223078
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