Featuring DN150CF flange, the oil-free 7KV ion pump 2L-200C offers 220L/S air pumping speed and closed-system operation, perfect for semiconductor and industrial applications.
The 7KV ion vacuum pump 2L-200C delivers 220L/S air and 2.4L/S argon pumping speeds with 1E-8 Pa ultimate vacuum, ideal for industrial closed ultra-high vacuum systems.
The Industrial-Grade 7KV Ion Vacuum Pump 2L-200C utilizes advanced sputter ion technology to deliver exceptional vacuum performance for closed industrial systems:
Superior pumping performance: 220L/S air speed with 2.4L/S argon capability
Ultra-high vacuum: Achieves 1×10⁻⁸Pa ultimate pressure
Closed system operation: No continuous backing pump required
Industrial durability: Designed for harsh operating environments
Contamination-free: Completely oil-free operation
Parameter | Specification |
Model | 2L-200C |
Flange | DN150CF |
Operating Voltage | 7KV |
Ultimate Pressure | 1×10⁻⁸Pa |
Bakeout Temperature | ≤200°C (magnetic)/≤300°C (non-magnetic) |
Dimensions | 500×265×430mm |
Weight | 100kg |
Semiconductor manufacturing: Provides clean vacuum for wafer processing
Industrial coating systems: Ensures high-quality thin film deposition
Material analysis instruments: Electron microscopes, mass spectrometers
New energy research: Nuclear fusion experimental devices
High-energy physics: Particle accelerator vacuum systems
Features reinforced electrode design and industrial-grade materials for continuous heavy-duty operation.
Can evacuate 200L chamber to operating vacuum in just 25 minutes.
Self-sustaining operation eliminates need for continuous backing pumps.
Optimized for semiconductor processes with effective gas handling.
Metal seal design ensures UHV integrity with leak rate <5×10⁻¹¹Pa·m³/s.
Multiple vacuum measurement systems provide real-time monitoring.
Special alloy electrodes provide 60,000+ hours operational life.
Multiple electrical protections with CE/UL safety certifications.
Only periodic electrode inspection needed - no regular consumables.
Professional sizing software available for optimal configuration.
Address : No 19, Zhanqianli, Dong'an, Jimei District, Xiamen, Fujian Province, China
Email : mike@xiamenbest.com vacuum@xiamenbest.com WhatsApp : +8613959235484 Phone: +8613959235484 +8615880223078