KYKY Ion Vacuum Pump DN150CF Professional Analysis: Complete Guide to Model 3L-100 with 7E-8Pa Ultimate Vacuum

Explore the KYKY Model 3L-100 DN150CF flange ion vacuum pump featuring 7E-8Pa ultimate vacuum, 110L/s air pumping speed, 24L/s argon speed, -5KV operating voltage with CE certification, designed for ultra-clean vacuum requirements in high-energy physics and semiconductor manufacturing.

KYKY DN150CF Ion Vacuum Pump Detailed Product Description

KYKY Model 3L-100 Core Specifications

Flange: Standard DN150CF UHV flange

Ultimate vacuum: 7×10⁻⁸Pa (CE certified)

Pumping speeds:

Air: 110L/s

Argon: 24L/s (optimized triode structure)

Operating voltage: -5KV DC

Starting pressure: ≤5×10⁻⁴Pa

KYKY Ion Pump Technical Advantages

Enhanced Triode Structure:
KYKY's patented titanium grid reflection technology permanently traps noble gas ions in pump walls, achieving 300% higher argon pumping speed compared to conventional designs.

Contamination-Free Operation:
The KYKY ion pump's stainless steel anode and titanium cathode assembly completely eliminates oil vapor contamination, meeting stringent cleanliness requirements for semiconductor processing and optical coating.

Dual Baking Modes:

With magnet: <200°C

Magnet-free version: <300°C

Compact Design:
The KYKY 3L-100 measures only 350×250×307mm (38kg with magnet) with four M10 electrode units for easy system integration.

KYKY Ion Pump Industrial Applications

High-energy physics: Particle accelerator vacuum systems

Microelectronics: Wafer etching equipment

Analytical instruments: Mass spectrometers, electron microscopes

Nuclear research: Tokamak vacuum chambers

Aerospace: Space environment simulation chambers

KYKY DN150CF Ion Vacuum Pump Frequently Asked Questions

1. How does KYKY DN150CF achieve high argon pumping speed?

The KYKY 3L-100 utilizes glancing-angle titanium grid technology to reflect and permanently bury argon ions in pump walls, delivering 300% better performance than standard diode pumps.

2. Does the 3L-100 require a backing pump?

The KYKY ion pump only needs initial evacuation to 5×10⁻⁴Pa, operating independently thereafter without continuous backing pump support.

3. What is the magnetic field strength?

Standard configuration features 0.12T permanent magnets, while magnet-free versions require external magnetic systems.

4. Why is KYKY ideal for semiconductor applications?

The oil-free design prevents hydrocarbon contamination, with 7E-8Pa vacuum meeting strict ALD and MBE process requirements.

5. What is the cathode lifespan?

Titanium cathodes last over 20,000 hours at 1×10⁻⁶Pa with modular replacement capability.

6. Is DN150CF compatible with ISO standards?

KYKY provides CF-FDN150 adaptor flanges for ISO-KF150 compatibility.

7. When does the pump need maintenance?

Service is required when current exceeds -5mA or pumping speed decreases by 30%, indicating cathode wear.

8. Does it support helium leak detection?

Yes, the KYKY 3L-100 can qualitatively detect helium leaks through discharge current monitoring.

9. What does CE certification include?

Full compliance with EMC, Low Voltage Directive (LVD), and Machinery Directive (MD) standards.

10. How does it benefit electron microscopes?

Maintains 10⁻⁷Pa vacuum to prevent gas molecule scattering and ensure imaging resolution.