Oil-Free -5KV Ion Vacuum Pump 55L/S (Air) 12L/S (Argon), Model: 3L-50

The 3L-50 oil-free -5KV ion vacuum pump delivers ultra-high vacuum (7×10⁻⁸Pa) with speeds of 55L/S (air) and 12L/S (argon). Ideal for scientific and industrial applications like semiconductor manufacturing and electron microscopy.

Detailed Product Description

Overview of the 3L-50 Ion Vacuum Pump

The 3L-50 oil-free ion pump utilizes sputter-ion technology to achieve ultra-high vacuum (UHV) levels (7×10⁻⁸Pa). It requires no continuous backing pump, operates silently, and is ideal for clean vacuum applications in research and industry.

Working Principle

Penning Discharge: Gas molecules are ionized under a strong magnetic field and -5KV electric field. Fresh titanium films from cathode sputtering trap gas particles.

Optimized for Noble Gases: A triode structure improves argon pumping speed (12L/S) by reflecting ions onto pump walls for burial.

Key Advantages

 Ultra-high vacuum (7×10⁻⁸Pa)
Oil-free & contamination-free operation
Zero vibration & silent – ideal for sensitive instruments
 No continuous backing pump required
 High-temperature tolerance (up to 200°C bakeable)

Applications

Particle accelerators & fusion research

Electron microscopes & mass spectrometers

Semiconductor fabrication & thin-film coating

Space simulation chambers & vacuum electronics

Technical Specifications

3L-50 Ion Pump Frequently Asked Questions (FAQ)

1. Does the 3L-50 ion pump require a backing pump?

No continuous backing pump is needed, but initial evacuation to ≤5×10⁻⁴Pa is required.

2. Why is the pumping speed lower for argon (12L/S vs. 55L/S for air)?

Argon is a noble gas and requires an optimized cathode structure for efficient pumping.

3. How does the oil-free design ensure clean vacuum?

Titanium sputtering traps gases without oil contamination.

4. Which industries use the 3L-50 ion pump?

Semiconductor, research labs, vacuum electronics, and space simulation.

5. Is the DN100CF flange compatible with ISO/KF standards?

Yes, adapters are available for ISO/KF connections.

6. How does the pump achieve 7×10⁻⁸Pa ultimate pressure?

Penning discharge + titanium gettering enables ultra-high vacuum.

7. Does the -5KV voltage require special safety measures?

The pump is designed with insulation, but proper handling is recommended.

8. How does the 3L-50 compare to Varian ion pumps?

Similar performance, but the 3L-50 offers a cost-effective alternative.

9. What is the lifespan of the ion pump?

Depends on gas load; titanium cathodes require replacement when depleted.

10. How should I maintain the 3L-50 pump?

Regularly check magnetic field strength and voltage; avoid dust contamination.