The CF Cross (CF Cross Connector) is a high-vacuum fitting based on the ConFlat (CF) flange standard, designed for research, semiconductor, and aerospace applications. It ensures ultra-high sealing integrity and efficient gas transfer. This article covers its features, technical specifications, and FAQs.
Discover the superior performance of CF Cross (CF Cross Connector) vacuum fittings, featuring ultra-high vacuum compatibility, corrosion-resistant design, and multi-industry applications. Explore technical specifications, selection guides, and FAQs.
The CF Cross (CF Cross Connector) is a vacuum fitting based on the ConFlat (CF) flange standard, featuring a cross-shaped connection structure. This design allows simultaneous connection of multiple vacuum pipelines or equipment, ensuring efficient gas or fluid distribution while maintaining an ultra-high vacuum environment (10⁻⁹ to 10⁻¹² mbar). It is widely used in semiconductor wafer fabrication, particle accelerators, space simulation chambers, and other applications requiring extreme sealing performance.
Feature | Description |
Ultra-High Vacuum Compatibility | Uses oxygen-free copper gaskets and 316L stainless steel, suitable for 10⁻¹² mbar extreme vacuum conditions. |
Smart Communication Integration | Optional sensor ports for real-time monitoring of pressure and leak rates (available in high-end models). |
Flexibility & Displacement Compensation | Bellows design absorbs ±5mm of pipeline vibration or thermal expansion. |
High Strength & Corrosion Resistance | Electro-polished and passivated for resistance to acidic gases and plasma corrosion. |
Easy Installation & Maintenance | Standard CF flange interface with bolt-fastening or quick-release clamp options. |
Scientific Research: Synchrotron radiation, nuclear fusion experiments
Semiconductor Manufacturing: Etching machines, CVD gas distribution systems
Aerospace: Satellite propulsion testing, space environment simulation chambers
Model | Part No. | Dimension A (mm) | Vacuum Range (mbar) | Max Pressure (MPa) |
CF16 | 55014-164 | 38.1 | ≤10⁻¹⁰ | 2.5 |
CF35 | 55014-354 | 51.8 | ≤10⁻¹¹ | 2 |
CF50 | 55014-504 | 62.5 | ≤10⁻¹¹ | 1.8 |
CF63 | 55014-634 | 81.5 | ≤10⁻¹² | 1.5 |
CF100 | 55014-1004 | 84.1 | ≤10⁻¹² | 1.2 |
CF160 | 55014-1604 | 92.2 | ≤10⁻¹² | 1 |
CF200 | 55014-2004 | 109.7 | ≤10⁻¹² | 0.8 |
Match the inner diameter (e.g., CF35 for DN35 tubing) and check the pressure rating (refer to the technical specs table).
Yes, 316L stainless steel with electro-polishing resists Cl₂, HBr, and other etching gases, but regular inspection is recommended.
A torque wrench is needed (e.g., 25Nm for CF16). Tighten bolts diagonally to ensure uniform sealing.
Baking at 150-250°C removes moisture and organic contaminants, ensuring 10⁻¹¹ mbar or better vacuum levels.
Use a helium leak detector on the sealing surfaces. Replace gaskets if indentation exceeds 0.1mm.
Yes, 45° or Y-shaped designs are possible, but structural integrity must be verified via pressure load calculations.
Up to 10 years under normal conditions, but frequent disassembly (>50 cycles) or particle contamination may reduce longevity.
Use acetone (non-silicone) for sealing surfaces. Always store with protective caps to prevent dust contamination.
Yes, via adapter flanges (e.g., CF35-KF40), but expect 1-2 orders of magnitude lower vacuum performance.
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