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This article details the structural features, technical specifications, and applications of the CF 45° Elbow, including its stainless steel construction, UHV compatibility, and critical roles in particle accelerators and vacuum coating systems, along with an FAQ section.
The CF 45° Elbow is a directional connector designed for high-vacuum systems, compliant with ConFlat (CF) flange standards. It provides a 45° flow path change while ensuring ultra-high vacuum (UHV) sealing, widely used in semiconductor, scientific research, and aerospace applications.
The CF Elbow 45° (CF 45° Elbow) is a high-vacuum directional fitting designed per ConFlat (CF) flange standards, enabling optimized system layouts with its 45° bending angle. Key functionalities include:
Flow direction control: Precisely redirects gas/liquid flow for complex piping arrangements.
Vacuum integrity: Metal-sealed construction maintains ultra-high vacuum down to 10⁻⁹ mbar.
Cross-industry compatibility: Meets stringent requirements in semiconductor fabrication, synchrotron radiation systems, and spacecraft propulsion.
| Component | Material & Specifications |
| CF Flange | 304L/316L stainless steel, mirror-finished (Ra ≤ 0.8μm), flatness ≤5μm for leak-free sealing. |
| 45° Bend Body | Electropolished (EP) inner surface, dead-end-free design to minimize turbulence. |
UHV compatibility: Operates at 10⁻¹² mbar extreme vacuum.
Zero-leak sealing: Copper gasket compression, helium leak-tested (<1×10⁻⁹ mbar·L/sec).
Corrosion resistance: Passes ASTM G48 salt spray tests, withstands plasma erosion.
Modular installation: Quick-disconnect design, compatible with ISO-KF/NW flanges.
Cleanroom certified: SEMI F57 compliant, particle-free.
PVD/CVD systems: Guides process gases in deposition equipment.
Etch tools: Channels corrosive gases (e.g., CF₄) with leak rates <1×10⁻⁹ cc/sec.
Synchrotrons: Beamline vacuum routing, surface roughness ≤0.1nm.
Electron microscopes: Maintains 10⁻⁷ Pa chamber vacuum.
Ion thruster testing: Withstands 1500°C xenon plasma.
Satellite thermal-vacuum tests: Seals reliably at -196°C to +120°C.
| Model | Part No. | Dimension A (mm) | Pressure Range | Flange Standard |
| CF16 | 55004-164 | 23.8 | 10⁻⁹ mbar | ISO 1609 |
| CF25 | 55004-254 | 28.9 | 10⁻⁹ mbar | DIN 28404 |
| CF35 | 55004-354 | 44.2 | 10⁻¹⁰ mbar | SEMI F73 |
| CF50 | 55004-504 | 52.5 | 10⁻¹⁰ mbar | ASME B16.37 |
*Operating temperature: -270°C to +450°C*
1: How to match elbow size with piping?
Calculate Reynolds number based on flow rate; select tubes with <±2% inner diameter tolerance.
2: Are custom angles (e.g., 30°/60°) available?
Standard is 45°; custom angles require ASTM BPE-certified materials.
3: How to enhance plasma resistance?
Opt for 316LN stainless steel with Al₂O₃ inner coating.
4: What’s the recommended torque for installation?
8-10N·m for CF16; 120-150N·m for CF100 (use torque wrench).
5: How to test for leaks?
Helium leak detection (<1×10⁻⁹ mbar·L/sec).
6: Is it suitable for corrosive gases?
Yes, with Hastelloy C-276 version (resists HCl/Cl₂).
7: What surface finishes are offered?
Mechanical polish (MP), electropolish (EP), passivation (PF).
8: How to connect with KF flanges?
Use CF-KF adapters (replace seals with Viton).
9: How does bend radius affect flow?
R/D ratio >1.5 recommended; otherwise >20% pressure drop.
10: Solutions for tight spaces?
SW series with quick clamps reduces space by 40%.
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