Varian Ion Pump 3L-400C: 420L/S High Vacuum Performance & Operation Guide

The Varian Ion Pump 3L-400C delivers 420L/S air pumping speed and 85L/S argon speed with DN150CF flange, achieving ultra-high vacuum down to 1×10⁻⁸ Pa. Ideal for scientific and industrial applications.

Varian Ion Pump 3L-400C Key Features

Varian Ion Pump 3L-400C Ultra-High Vacuum Performance

420L/S air pumping speed for rapid evacuation

85L/S argon speed for efficient inert gas handling

Ultimate vacuum: 1×10⁻⁸ Pa

DN150CF flange for standard vacuum system compatibility

Varian Ion Pump 3L-400C Oil-Free Operation

No hydrocarbon contamination (ideal for semiconductors & optics)

Zero mechanical vibration for stable operation

No continuous forepump required

Varian Star-Cell Ion Pump 3L-400C Enhanced Design

Optimized titanium cathodes for better argon pumping

Four electrode cells for extended service life

Bakeable up to 200°C (with magnet) / 300°C (magnet-free)

Varian Ion Pump 3L-400C Technical Specifications

How the Varian Ion Pump 3L-400C Works

Varian Ion Pump 3L-400C Penning Discharge Principle

Electric field between stainless steel anode & titanium cathode

Gas ionization under strong magnetic field

Sputtered titanium films trap gas molecules

Varian Star-Cell Ion Pump 3L-400C Argon Optimization

Argon ions strike cathode at grazing angles for better burial

Reduces inert gas re-emission, maintaining stable pumping

Varian Ion Pump 3L-400C Applications

High-Energy Physics & Research

Particle accelerators, synchrotron light sources

Nuclear fusion experiments

Semiconductor & Electronics

Molecular beam epitaxy (MBE) systems

IC coating & thin-film deposition

Analytical Instruments & Aerospace

Electron microscopes, mass spectrometers

Space simulation chambers

Varian Ion Pump 3L-400C FAQs

1. What is the starting pressure for Varian Ion Pump 3L-400C?

≤5×10⁻⁴ Pa; requires a turbomolecular pump for initial evacuation.

2. How to maximize argon pumping in Varian 3L-400C?

 Maintain proper bakeout (<200°C) and avoid contamination.

3. How to install Varian DN150CF Ion Pump 3L-400C?

 Use OFHC copper gasket, tighten bolts diagonally, and perform helium leak check.

4. What system size suits 420L/S Varian 3L-400C?

Best for 500-1000L ultra-high vacuum systems (e.g., accelerators).

5. What if Varian 3L-400C shows discharge issues?

 Check -5kV power supply, magnet strength, and electrode cleanliness.

6. Does Varian 3L-400C need maintenance?

Inspect titanium cathodes every 5000 hours; replace if speed drops 20%.

7. Maximum bakeout temperature for Varian 3L-400C?

200°C (with magnet) or 300°C (magnet-free).

8. Lifespan of Varian Star-Cell Ion Pump 3L-400C?

Cathode life: 2-5 years (depends on gas load).

9. How to avoid contamination in oil-free Varian 3L-400C?

 Minimize air exposure and perform regular bakeouts.

10. How to choose a high-vacuum main pump?

 Consider gas types, speed needs, and ultimate vacuum; 3L-400C excels in pure environments.